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Phenom ProX

The Phenom ProX desktop scanning electron microscope (SEM) is the ultimate all-in-one imaging and X-ray analysis system. With the Phenom ProX , sample structures can be physically examined and their elemental composition determined. 

Viewing three-dimensional images of microscopic structures only solves half the problem when analyzing samples. It is often necessary to collect more than optical data to be able to identify the different elements in a specimen. This is accomplished in the Phenom ProX with a fully integrated and specifically designed EDS detector. 

EDS is a technique that analyzes X-rays generated by the bombardment of the sample by an electron beam. EDS elemental analysis is fully embedded into the Phenom ProX system. X-ray detector and control software are combined in one package. 

The Element Identification (EID) software package allows the user to program multiple point analysis, and identify any hidden elements within the sample. Additionally, this software can be expanded with elemental mapping functionality. The step-by-step guided process within the EID software helps the user to collect all X-ray results in an organized and structured way.

Key Specifications
Light optical magnification
20 - 135x

Electron optical magnification range

80 - 130,000x


≤ 10 nm
Digital zoom
Max 12x
Light optical navigation camera
Acceleration voltages

Default: 5 kV, 10 kV and 15 kV
Advanced mode: adjustable range 
between 4,8 kV and 15 kV imaging and 
analysis mode

Vacuum modes

Standard mode
​Charge reduction mode



Sample size
Up to 32 mm (Ø)
Sample height
Up to 100 mm


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